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Jianfeng Wang
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Publications (1)
Proceedings Article | 5 December 2011 Paper
Comparison of wavefront reconstruction with modal method and zonal method for the inspection of catadioptric projection optics using Hartmann wavefront sensor
Jianfeng Wang, Ke Liu, Yanqiu Li, Hai Wang, Guanghui Li
Proceedings Volume 8197, 81970A (2011) https://doi.org/10.1117/12.920014
KEYWORDS: Wavefronts, Projection systems, Wavefront reconstruction, Combined lens-mirror systems, Wavefront sensors, Inspection, Optical components, Zernike polynomials, Reflectivity, Optics manufacturing
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