Dr. Jiang Ji
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 January 2008
Proc. SPIE. 6832, Holography and Diffractive Optics III
KEYWORDS: Diffraction, X-rays, X-ray diffraction, Computer simulations, Near field diffraction, Zone plates, X-ray astronomy, X-ray lithography, X-ray technology, Synchrotron x-ray imaging

Proceedings Article | 4 January 2008
Proc. SPIE. 6832, Holography and Diffractive Optics III
KEYWORDS: Gold, Electron beam lithography, Polymethylmethacrylate, X-rays, Silicon, Photomasks, Photoresist processing, X-ray telescopes, Electroplating, X-ray lithography

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