Dr. Jianghui Liu
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 6 February 2019 Paper
Proceedings Volume 10842, 108421B (2019) https://doi.org/10.1117/12.2505369
KEYWORDS: Optical lithography, Photomasks, Digital micromirror devices, Microlens, Micromirrors

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