Dr. Jiangtao Hu
at Nanometrics Inc
SPIE Involvement:
Author
Publications (23)

SPIE Journal Paper | October 16, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Critical dimension metrology, Scatterometry, Line edge roughness, Reactive ion etching, Metrology, Scatter measurement, Semiconducting wafers, Optics manufacturing, Magnetism, Etching

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Ellipsometry, Metrology, Data modeling, Manufacturing, Scatterometry, Critical dimension metrology, Line edge roughness, Reactive ion etching, Semiconducting wafers, Scatter measurement

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Metrology, Etching, Manufacturing, Magnetism, Scatterometry, Measurement devices, Photomasks, Critical dimension metrology, Reactive ion etching, Semiconducting wafers

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Indium gallium arsenide, Metrology, Spectroscopy, Germanium, Scanning electron microscopy, Scatterometry, Process control, Transistors, Molybdenum, Fin field effect transitor

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Ellipsometry, Metrology, Scanners, 3D modeling, Scanning electron microscopy, Scatterometry, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Metrology, Scatterometry, 3D metrology, Spectroscopic ellipsometry, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Neodymium, Semiconducting wafers

Showing 5 of 23 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top