Dr. Jianjun Hao
Senior scientist at SACHEM Inc
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | April 1, 2008
JM3 Vol. 7 Issue 02
KEYWORDS: Etching, Silicon, Lithography, Capillaries, Ultraviolet radiation, Coating, Liquids, Polymers, Optical lithography, Data modeling

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Optical lithography, Annealing, Molecules, Dielectrics, Silicon, Chlorine, Bromine, Back end of line, Front end of line

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Diamond, Optical lithography, Etching, Copper, Dielectrics, Silicon, Scanning electron microscopy, Liquids, Back end of line

PROCEEDINGS ARTICLE | March 27, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Thin films, Lithography, Safety, Etching, Capillaries, Silicon, Interferometry, Silicon films, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Optical lithography, Polymers, Copper, Dielectrics, Silicon, Polymerization, Sol-gels, Liquids, Chemical mechanical planarization

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Copper, Dielectrics, Silicon, Plasma etching, Nanoimprint lithography, Semiconducting wafers

Showing 5 of 6 publications
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