Dr. Jianjun Hao Profile

Dr. Jianjun Hao

Senior scientist at SACHEM Inc

SPIE Involvement:

Author

Publications (6)

SPIE Journal Paper | 1 April 2008

Simulation and design of planarizing materials for reverse-tone step and flash imprint lithography

Michael Lin, Brook Chao, Jianjun Hao, Kyle Osberg, Paul Ho, C. Grant Willson

JM3, Vol. 7, Issue 02, 023008, (April 2008) https://doi.org/10.1117/12.10.1117/1.2896047

KEYWORDS: Etching, Silicon, Lithography, Capillaries, Ultraviolet radiation, Coating, Liquids, Polymers, Optical lithography, Data modeling

Read Abstract +

Proceedings Article | 21 March 2007 Paper

Multilevel step and flash imprint lithography for direct patterning of dielectrics

Wei-Lun Jen, Frank Palmieri, Brook Chao, Michael Lin, Jianjun Hao, Jordan Owens, Ken Sotoodeh, Robin Cheung, C. Grant Willson

Proceedings Volume 6517, 65170K (2007) https://doi.org/10.1117/12.711602

KEYWORDS: Etching, Silicon, Lithography, Optical lithography, Back end of line, Diamond, Dielectrics, Copper, Scanning electron microscopy, Liquids

Read Abstract +

Proceedings Article | 21 March 2007 Paper

Photocurable silicon-based materials for imprinting lithography

Jianjun Hao, Michael Lin, Frank Palmieri, Yukio Nishimura, Huang-Lin Chao, Michael Stewart, Austin Collins, Kane Jen, C. Grant Willson

Proceedings Volume 6517, 651729 (2007) https://doi.org/10.1117/12.712261

KEYWORDS: Silicon, Dielectrics, Molecules, Lithography, Annealing, Bromine, Front end of line, Back end of line, Chlorine, Optical lithography

Read Abstract +

Proceedings Article | 27 March 2006 Paper

Planarization for Reverse-Tone Step and Flash Imprint Lithography

Michael Lin, Huang-Lin Chao, Jianjun Hao, Eui Kim, Frank Palmieri, Woon Kim, Michael Dickey, Paul Ho, C. Willson

Proceedings Volume 6151, 61512G (2006) https://doi.org/10.1117/12.655626

KEYWORDS: Etching, Silicon, Lithography, Capillaries, Thin films, Silicon films, Safety, Interferometry, Semiconducting wafers, Photomasks

Read Abstract +

Proceedings Article | 23 March 2006 Paper

Multi-level step and flash imprint lithography for direct patterning of dielectrics

Frank Palmieri, Michael Stewart, Jeff Wetzel, Jianjun Hao, Yukio Nishimura, Kane Jen, Colm Flannery, Bin Li, Huang-Lin Chao, Soo Young, Woon Kim, Paul Ho, C. Willson

Proceedings Volume 6151, 61510J (2006) https://doi.org/10.1117/12.655604

KEYWORDS: Dielectrics, Copper, Sol-gels, Polymers, Silicon, Optical lithography, Chemical mechanical planarization, Liquids, Polymerization, Lithography

Read Abstract +

Proceedings Article | 6 May 2005 Paper

Direct imprinting of dielectric materials for dual damascene processing

Michael Stewart, Jeffery Wetzel, Gerard Schmid, Frank Palmieri, Ecron Thompson, Eui Kyoon Kim, David Wang, Ken Sotodeh, Kane Jen, Stephen Johnson, Jianjun Hao, Michael Dickey, Yukio Nishimura, Richard Laine, Douglas Resnick, C. Willson

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599977

KEYWORDS: Dielectrics, Silicon, Copper, Semiconducting wafers, Optical lithography, Etching, Lithography, Metals, Nanoimprint lithography, Plasma etching

Read Abstract +

Showing 5 of 6 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years