The femtosecond electron diffraction (FED) is a unique method for the study of the changes of complex molecular
structures, and has been specifically applied in the investigations of transient-optics, opto-physics, crystallography,
and other fields. The FED system designed by the present group, consists of a 35nm Ag photocathode evaporated on
an ultraviolet glass, an anode with a 0.1mm aperture, two pairs of deflection plate for the deflection of electron beams
in X and Y directions, and the Y deflection plate can be used as a scanning plate while measuring the pulse width of
electron beams, the double MCPs detector for the enhancing and detecting of electron image. The magnetic lens was
used for the focusing of the electron beams, and the focal length is 125mm. The distance between the object(the
photocathode) and the image(the sample) is 503mm, and the size of electron beams is smaller than 17microns after
focusing, the convergence angle is of -0.075~0.075°, and the temporal resolution is better than 350fs.
It has been shown that it is possible to fabricate very small lenses by melting islands of inorganic photoresist on a glass substrate. The inorganic photoresist composited in our laboratory is suitable to be exposed by Electron Beam (EBE) or X-Ray. We have obtained the lithophotography pattern with 0.6 micrometers line width by EGE exposure. Because the resist pattern will not swell and distort during the processing, there is no problem of shelf life. We have made lenses with diameter from 0.8 mm to 1.0 mm, in the form of spheres, and have studied their optical properties.
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