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Jianliang You
at Concordia Univ
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Publications (1)
Proceedings Article | 8 September 2006 Paper
Study on a symmetrically supported electrostatic actuated micro-platform
Jianliang You, Muthukumaran Packirisamy, Ion Stiharu
Proceedings Volume 6343, 63433Y (2006) https://doi.org/10.1117/12.708253
KEYWORDS: Semiconducting wafers, Electrodes, Etching, Microelectromechanical systems, Silicon, Actuators, Mathematical modeling, Beam shaping, Wafer bonding, Metals
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