Jianliang You
at Concordia Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 8 September 2006
Proc. SPIE. 6343, Photonics North 2006
KEYWORDS: Mathematical modeling, Microelectromechanical systems, Actuators, Etching, Electrodes, Metals, Silicon, Beam shaping, Semiconducting wafers, Wafer bonding

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