Jianwei Gong
Student at Univ of Central Florida
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5346, MOEMS and Miniaturized Systems IV
KEYWORDS: Microelectromechanical systems, Actuators, Thin films, Gas sensors, Sensors, Particles, Hydrogen, Platinum, Photomasks, Source mask optimization

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
KEYWORDS: Actuators, Etching, Nickel, Silicon, Finite element methods, Microfabrication, Reactive ion etching, Semiconducting wafers, Shape memory alloys, Liquids

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