Line-structured light sensor is a three-dimensional measurement method which combines the advantage of high precision and speed, applicable in many fields. The mathematical model of line-structured light sensor is an essential foundation which determines measurement precision. Through the comparison of the three representative models which are deduced from different starting points and analysis of the model constraint conditions, we build a uniform and flexible model which shows the common characteristics and connections of the previous models and combines the flexibility and clear geometric meanings of the structured parameters with a correctable constraint condition. It is suitable to most conditions and structured parameters design of line-structured light sensor.
Macro-micro fast coupling system of dual-stage is used for the detachment and coupling of the macro-motion system and the wafer-stage. When the macro-motion system couples with the wafer-stage, the wafer-stage is driven by macro-motor to achieve long stroke motion. In this paper, the bottom air bearings of wafer stage are analyzed when the driving force of macro motor shifts the center of mass of wafer stage in Z direction. The X, Y, Z stiffness of the coupling system are obtained by using ANSYS.
The lubricating mechanism and improved performances of MoS2 film in bearings is analyzed in this paper. In order to improve the performance of solid lubricated bearings, the running-in is necssary. The design of the running-in system which can change the bearing preload during the process of running-in is introduced in detail. The results of the running-in experiments are analyzed.