Dr. Jie Ma
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 12 January 2009
Proc. SPIE. 7133, Fifth International Symposium on Instrumentation Science and Technology

Proceedings Article | 4 January 2008
Proc. SPIE. 6832, Holography and Diffractive Optics III
KEYWORDS: Gold, Electron beam lithography, Polymethylmethacrylate, X-rays, Silicon, Photomasks, Photoresist processing, X-ray telescopes, Electroplating, X-ray lithography

Proceedings Article | 21 November 2007
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Gold, Lithography, Optical design, X-rays, Wave propagation, Photomasks, Semiconducting wafers, X-ray lithography, Beam propagation method, Light wave propagation

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