The non-linearity of the super-RENS mask can be used in optical data storage, which can greatly increase the disk’s density. Experiment is carried on the traditional mastering system with modification. We adopt the SiN/Sb/SiN multiplayer as the mask to insert the optical mask. For 413nm semiconductor laser and lens with NA=0.9, the diffraction limit is 200nm theoretically. Mark-120nm much smaller than that size is generated in the experiment. The thickness of Sb in the mask layers has much effect on the mastering signal intensity. For different power, we should control the thickness of Sb film. The experiments results show that the super-RENS mask can actually reduce the size of the mark obviously and realize the high density optical storage.
Two stage positioning method which is composed of coarse positioning and fine positioning is a way to increase the precision of linear feeding in high density disk mastering. The control method of two stage positioning is proposed in this paper. Different control models are compared and the suitable one is chosen. The PID controllers for coarse and fine tables are designed. The numerical simulating results show that the two stage positioning system with PID controllers has good performance in linear feeding with steady error less than 10nm. The coarse positioning table compensates the major component of displacement in linear feeding while the fine positioning table compensates the minor one. The two stage positioning system can well satisfied the requirement of high density disk mastering in theoretical.