CONFERENCE PROCEEDINGS
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Jie Yu
at CIOMP
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Publications (3)
Proceedings Article | 19 March 2018 Paper
Low-stress and high-reflectance Mo/Si multilayers for EUVL by magnetron sputtering deposition with bias assistance
Bo Yu, Liping Wang, Hailiang Li, Yao Xie, Hui Wang, Haitao Zhang, Shun Yao, Yu Liu, Jie Yu, Chun Li, Changqing Xie, Chunshui Jin
Proceedings Volume 10583, 105831T (2018) https://doi.org/10.1117/12.2294479
KEYWORDS: Silicon, Multilayers, Reflectivity, Molybdenum, Extreme ultraviolet, Crystals, Sputter deposition, Argon, Ions, Extreme ultraviolet lithography
Proceedings Article | 27 September 2016 Paper
Ultra-high accuracy point diffraction interferometer: development, acccuracy evaluation and application
Jie Yu, Haitao Zhang, Chunshui Jin, Dongmei Ma, Hui Wang, Zengxiong Lu
Proceedings Volume 9684, 96840T (2016) https://doi.org/10.1117/12.2246269
KEYWORDS: Point diffraction interferometers, Diffraction, Wavefronts, Wavefront aberrations, Optical testing, Mirrors, Monochromatic aberrations, Spherical lenses, Interferometers, Extreme ultraviolet
Proceedings Article | 22 June 2015 Paper
Point diffraction interferometry based on the use of two pinholes
Nikolay Voznesenskiy, Dongmei Ma, Chunshui Jin, Haitao Zhang, Jie Yu, Mariia Voznesenskaia, Tatiana Voznesenskaia, Wenlong Zhang
Proceedings Volume 9525, 95251K (2015) https://doi.org/10.1117/12.2184771
KEYWORDS: Wavefronts, Diffraction, Interferometry, Spherical lenses, Optical testing, Wave plates, Mirrors, Interferometers, Point diffraction interferometers, Phase shifting
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