Jie Yu
at CIOMP
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Multilayers, Argon, Sputter deposition, Crystals, Ions, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum

Proceedings Article | 27 September 2016
Proc. SPIE. 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
KEYWORDS: Diffraction, Monochromatic aberrations, Mirrors, Point diffraction interferometers, Interferometers, Wavefronts, Wavefront aberrations, Optical testing, Extreme ultraviolet, Spherical lenses

Proceedings Article | 22 June 2015
Proc. SPIE. 9525, Optical Measurement Systems for Industrial Inspection IX
KEYWORDS: Diffraction, Mirrors, Phase shifting, Point diffraction interferometers, Interferometers, Interferometry, Wavefronts, Wave plates, Optical testing, Spherical lenses

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