Dr. Jigang Ma
SPIE Involvement:
Author
Profile Summary

Jigang Ma received Ph.D. degree in microelectronics in 2015. He had research experience in sub 10nm logic and emerging memory device characterization, variability and modeling.
He is currently a design Engineer to improve on-product performance, in ASML, Netherlands. His current research interests include on-product performance, process integration and patterning for future device technology node.
Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: Optical alignment, Semiconducting wafers, Overlay metrology, Algorithm development, Semiconductor manufacturing, Scanners, Process control, Device simulation

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Optical alignment, Overlay metrology, Semiconducting wafers, Deep ultraviolet, Scanners, Lithography, Sensors, Optimization (mathematics), Feedback control

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