Jih-Hsien Yeh
Technical Manager at United Microelectronics Corp
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Semiconductors, Error analysis, Nondestructive evaluation, Atomic force microscopy, Scanning electron microscopy, Transmission electron microscopy, Line width roughness, Optical proximity correction, Critical dimension metrology, Line edge roughness

Proceedings Article | 21 March 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Metrology, Defect detection, Inspection, Scanning electron microscopy, Microelectronics, Neodymium, Semiconducting wafers, Yield improvement, Classification systems, Defect inspection

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Electron beams, Defect detection, Tungsten, Resistance, Inspection, Electron microscopes, Scanning electron microscopy, Transmission electron microscopy, Semiconducting wafers, Failure analysis

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Oxides, Etching, Silicon, Nondestructive evaluation, Photodiodes, Atomic force microscopy, Scanning electron microscopy, Transmission electron microscopy, Process control, Semiconducting wafers

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Polishing, Metrology, Sensors, Copper, Ultrasonics, Transmission electron microscopy, Picosecond phenomena, Semiconducting wafers, Signal detection, Chemical mechanical planarization

Showing 5 of 6 publications
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