Jihong Chen
at Texas Instruments Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 29 April 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Monte Carlo methods, Transistors, Manufacturing, TCAD, Statistical analysis, Data modeling, Single sideband modulation, Silicon, Diffractive optical elements, Process control

Proceedings Article | 12 July 2002
Proc. SPIE. 4692, Design, Process Integration, and Characterization for Microelectronics
KEYWORDS: Diffusion, Monte Carlo methods, TCAD, Dielectrics, Fluorine, Interfaces, Boron, Silicon, Transistors, Germanium

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