Dr. Jihoon Kim
R&D project leader at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Optical lithography, Etching, Polymers, Annealing, Silicon, Scanning electron microscopy, Directed self assembly, Line edge roughness, Photomicroscopy, Semiconducting wafers

SPIE Journal Paper | 2 July 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Etching, Scanning electron microscopy, Silicon, Inspection, Semiconducting wafers, Diffractive optical elements, Defect inspection, Thin film coatings, Directed self assembly

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Thin films, Etching, Dry etching, Polymers, Annealing, Coating, Scanning electron microscopy, Directed self assembly, Plasma etching, Photomicroscopy

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Etching, Chemistry, Directed self assembly, Plasma etching, Line edge roughness, Semiconducting wafers, Tolerancing

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Optical lithography, Polymethylmethacrylate, Etching, Annealing, Silicon, Scanning electron microscopy, Directed self assembly, Picosecond phenomena, Neodymium, Tolerancing

Showing 5 of 11 publications
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