Dr. Jiin-Hong Lin
Principal Engineer at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 October 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Femtosecond phenomena, Deep ultraviolet, Opacity, Quartz, Manufacturing, Chromium, Pellicles, Image transmission, Photomasks, Critical dimension metrology

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