Jim R. Rodriguez
Director, Technology Development at Zygo Extreme Precision Optics
SPIE Involvement:
Publications (10)

Proceedings Article | 16 March 2015 Paper
Proceedings Volume 9422, 94220K (2015) https://doi.org/10.1117/12.2085934
KEYWORDS: Multilayers, Reflectivity, Extreme ultraviolet lithography, Extreme ultraviolet, Annealing, Resistance, Oxides, Reflectometry, Silicon, Oxidation

Proceedings Article | 17 April 2014 Paper
Proceedings Volume 9048, 90481I (2014) https://doi.org/10.1117/12.2046290
KEYWORDS: Sensors, Extreme ultraviolet, Reflectometry, Polarization, Radiation effects, Reflectivity, Motion models, EUV optics, 3D modeling, Data modeling

Proceedings Article | 18 March 2014 Paper
Proceedings Volume 9048, 90483C (2014) https://doi.org/10.1117/12.2049279
KEYWORDS: Extreme ultraviolet, Reflectivity, Infrared radiation, Extreme ultraviolet lithography, Plasma, Infrared technology, Neodymium, Nickel, Surface finishing, Diffraction gratings

Proceedings Article | 4 May 2011 Paper
Proceedings Volume 8076, 80760N (2011) https://doi.org/10.1117/12.889519
KEYWORDS: Reflectivity, Extreme ultraviolet lithography, Lanthanum, Multilayers, Extreme ultraviolet, Mirrors, Sputter deposition, Laser beam diagnostics, Boron, X-ray optics

Proceedings Article | 6 May 2005 Paper
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.619290
KEYWORDS: Optical coatings, Reflectivity, Photovoltaics, Extreme ultraviolet, Microscopes, Reticles, Light scattering, Mirrors, Atomic force microscopy, Prototyping

Showing 5 of 10 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top