Dr. Jimena Olivares
Professor at Univ Politécnica de Madrid
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 5 May 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Resonators, Silicon, Biosensors, Atomic force microscopy, Latex, Aluminum nitride, Zinc oxide, Liquids

Proceedings Article | 19 May 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Oxides, Silica, Etching, Sputter deposition, Silicon, Oxygen, Silicon films, Surface micromachining, Absorption

Proceedings Article | 19 May 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Proteins, Molecules, Silicon, Hydrogen, Nitrogen, Reliability, Atomic force microscopy, Adsorption, Aluminum nitride

Proceedings Article | 21 April 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Avalanche photodetectors, Capacitors, Resonators, Sensors, Electrodes, Dielectrics, Photodiodes, Laser interferometry, Bridges, Aluminum nitride

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Actuators, Optical lithography, Electrodes, Silicon, 3D modeling, Finite element methods, Bridges, Aluminum nitride, Molybdenum

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Polishing, Etching, Sputter deposition, Particles, Germanium, Silicon, Oxygen, Aluminum nitride, Chemical mechanical planarization

Showing 5 of 6 publications
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