Jin-Sook Choi
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Photomasks, Visualization, Data modeling, Optical proximity correction, Model-based design, Data centers, Resolution enhancement technologies, Standards development, Software development, Computing systems

Proceedings Article | 20 May 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Control systems, Etching, Critical dimension metrology, Logic, Photomasks, Process engineering, Logic devices, Cadmium, Electronics, Bridges

Proceedings Article | 28 June 2005
Proc. SPIE. 5853, Photomask and Next-Generation Lithography Mask Technology XII
KEYWORDS: Neural networks, Lithography, Resolution enhancement technologies, Artificial neural networks, Optical proximity correction, SRAF, Error analysis, Critical dimension metrology, Cadmium, Photomasks

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