Jin-Young Kim
at Inje Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 September 2001 Paper
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Thin films, Polymers, Coating, Photoresist materials, Critical dimension metrology, Chlorine, Thin film coatings, Semiconducting wafers, System on a chip, Liquids

Proceedings Article | 6 October 1998 Paper
Proc. SPIE. 3521, Machine Vision Systems for Inspection and Metrology VII
KEYWORDS: Imaging systems, Calibration, X-rays, X-ray sources, Inspection, Distortion, Digital imaging, Image intensifiers, X-ray imaging, Digital x-ray imaging

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