Jin Youp Kim
at DongbuAnam Semiconductor Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 11 April 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Optical lithography, Etching, Silicon, Resistance, Photoresist materials, Process control, Photomasks, Transistors, Line edge roughness

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