In this paper, we report the high-temperature uncooled and high-speed directly modulated 1.3μm wavelength AlGaInAs/InP MQW-DFB ridge waveguide laser diodes. By optimizing the structure of active region based on AlGaInAs strained MQW, and the design of DFB grating, such as the position, coupling coefficient and the detuning with respect to the material peak gain, we have successfully fabricated high-speed and uncooled 1.3μm DFB laser diodes. Large bandwidth of 15GHz was achieved at room temperature. Large characteristic temperature of 80K and small degradation of slope efficiency of 1.2dB from 25°C to 85°C have been realized.
We successfully fabricated the angled strip DC-PBH style SLED devices by using low damage ICP dry etching technology. The mesa of DC-PBH SLED was formed by Cl2/N2 ICP dry etching process. The low DC bias (<100 eV) of ICP etching technology can reduce the damage caused by ordinary RIE technique and Cl2/N2 based process can get rid of chemical damage caused by CH4/H2. High out-put power SLED device was obtained by using low damage ICP dry etching, the out-put power is 2 mW at 100 mA inject current (CW) at 25°C. Through optimized the angle of the active strip and AR optical film design, the full width of the half maximum (FWHM) of the spectrum at 2 mW out-put power can reach 46.4nm and the ripple of the SLED spectrum is low down to 0.4 dB.