Dr. Jin Li
Project Manager at Merck Japan
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 19 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Directed self assembly, Annealing, Nanolithography, Lithography, Thin film manufacturing, Thin films, Resolution enhancement technologies, High volume manufacturing, Polymethylmethacrylate, Temperature metrology

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Directed self assembly, Semiconducting wafers, Scanning electron microscopy, Etching, Silicon, Optical lithography, Polymers, Line edge roughness, Photomicroscopy, Annealing

Proceedings Article | 22 March 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Directed self assembly, Metrology, Optical lithography, Silicon, Semiconducting wafers, Etching, Bridges, Polymers, Manufacturing, Scanning electron microscopy, Epitaxy, Lithography, Thin film coatings

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Photons, Electrons, Optical lithography, Lithography, Printing, Polymers, Photomasks, Absorbance

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Extreme ultraviolet, Electron beam lithography, Line width roughness, Semiconducting wafers, Extreme ultraviolet lithography, Polymers, Coating, Absorption, Etching, Photoresist materials

Showing 5 of 7 publications
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