Dr. Jin Wang
at Advanced Micro Devices Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 17, 2005
Proc. SPIE. 5755, Data Analysis and Modeling for Process Control II
KEYWORDS: Oxides, Polishing, Data modeling, Error analysis, Process control, Semiconductor manufacturing, Semiconducting wafers, Surface finishing, Process modeling, Chemical mechanical planarization

PROCEEDINGS ARTICLE | July 1, 2003
Proc. SPIE. 5044, Advanced Process Control and Automation
KEYWORDS: Metrology, Statistical analysis, Etching, Digital filtering, Error analysis, Control systems, Time metrology, Process control, Semiconductor manufacturing, Process modeling

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