Dr. Jing Quan Lin
at AIST
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Mirrors, Particles, Ions, Solids, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma generation, Pulsed laser operation, Plasma, Tin

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Semiconductor lasers, Laser stabilization, Diodes, Extreme ultraviolet, Extreme ultraviolet lithography, YAG lasers, Signal detection, Pulsed laser operation, Plasma, Liquids

Proceedings Article | 16 June 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Mirrors, Particles, Magnetism, Xenon, Solids, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma generation, Plasma, Tin

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