Jing Yi Chen
at National Central Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | August 27, 2005
Proc. SPIE. 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II
KEYWORDS: Optical components, Thin films, Refractive index, Optical properties, Ultraviolet radiation, Silicon, Scanning electron microscopy, Silicon films, Plasma enhanced chemical vapor deposition, Chemical elements

PROCEEDINGS ARTICLE | October 8, 2004
Proc. SPIE. 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices
KEYWORDS: Optical components, Refractive index, Diffractive optical elements, Ultraviolet radiation, Silicon, Silicon films, Transmittance, Plasma enhanced chemical vapor deposition, Chemical elements, Nanolithography

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