Jing Li
at Nanyang Tech Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 3 October 2003
Proc. SPIE. 5145, Microsystems Engineering: Metrology and Inspection III
KEYWORDS: Etching, Oxides, Silicon, Reactive ion etching, Optical switching, Microelectromechanical systems, Deep reactive ion etching, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Anisotropic etching

Proceedings Article | 3 September 2002
Proc. SPIE. 4907, Optical Switching and Optical Interconnection II
KEYWORDS: Fiber Bragg gratings, Switches, Microelectromechanical systems, Optical switching, Micromirrors, Signal attenuation, Metals, Switching, Silicon, Thermal effects

Proceedings Article | 19 April 2002
Proc. SPIE. 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
KEYWORDS: Etching, Oxides, Metals, Silicon, Nanoimprint lithography, Optical switching, Switches, Photomasks, Mirrors, Optical fabrication

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