Dr. Jing Sha
at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Optical lithography, Monte Carlo methods, Design for manufacturing, Semiconductor manufacturing, Semiconducting wafers

Proceedings Article | 6 September 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Optical lithography, Calibration, Etching, Metals, Error analysis, Computer simulations, Directed self assembly, Extreme ultraviolet lithography, Critical dimension metrology, Process modeling

Proceedings Article | 28 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Oxides, Lithography, Etching, Metals, Dielectrics, Scanning electron microscopy, Directed self assembly, Critical dimension metrology, Tin, Back end of line

Proceedings Article | 30 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Electron beam lithography, Optical lithography, Polymers, Glasses, Silicon, Photoresist materials, Microelectronics, Plasma etching, Fluorine, Photoresist developing

Proceedings Article | 26 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Deep ultraviolet, Imaging systems, Polymers, Annealing, Diffusion, Carbon dioxide lasers, Extreme ultraviolet lithography, Temperature metrology, Absorption, Chemically amplified resists

Showing 5 of 9 publications
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