Whether velocity sensor can accurately acquire payload vibration information has become the most important factor that restricts vibration isolation performance. In order to get accurate sensor parameters, DC excitation method is used to measure the central frequency, damping ratio and sensitivity of inertial velocity sensor. The influence of different currents on the measurement accuracy of sensors such as response voltage, central frequency, damping ratio and sensitivity is analyzed, and the optimal current value is determined, which provides a powerful guarantee for obtaining accurate sensor parameters. Finally, the GS-11D sensor is used to carry out the experiment. The experimental results show that the relative error of the central frequency, damping ratio and sensitivity of the DC excitation method can meet the application requirements.
Actuators made of Giant Magnetostrictive Material (GMM) are used more and more widely in ultra-precision positioning, processing, measurement, and vibration isolation of equipment. While a single Giant Magnetostrictive Actuator (GMA) has low load capacity and non-ideal dynamic output characteristics, this paper presents a differential Giant Magnetostrictive Mitro-Displacement Actuator. The effect of the equivalent stiffness and quality of the load on the output characteristics of the actuator is analyzed by establishing the dynamic model of differential GMA. The experimental results show that compared to a single GMA micro-displacement actuator system, the differential GMA system has a positioning noise of ±3 nm, a resolution of 6 nm within a 18.5μm travel range. In the composite control system, a hysteresis-free sinusoidal displacement output with an amplitude of 3μm within 200 Hz is realized, and the maximum output error is 0.6μm, which effectively improves the dynamic performance of the actuator and improves the load capacity of the actuator.
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