Dr. Jing Wang
at Univ of Minnesota
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 May 2009
Proc. SPIE. 7364, Nanotechnology IV
KEYWORDS: Contamination, Nanoparticles, Scanners, Particles, Pellicles, Photomasks, Extreme ultraviolet lithography, Atmospheric particles, Atmospheric modeling, Protactinium

Proceedings Article | 22 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Gold, Silica, Aerosols, Calibration, Quartz, Particles, Inspection, Photomasks, Atmospheric particles, Standards development

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