Dr. Jing Xu
at SIMIT
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Etching, Dry etching, Ions, Silicon, Surface roughness, Micromirrors, Deep reactive ion etching, Wet etching, Semiconducting wafers, Anisotropic etching

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Optical fibers, Sensors, Silicon, Collimators, Micromirrors, Deep reactive ion etching, Neodymium, Semiconducting wafers, Signal detection

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