We report the photoluminescence enhancement of nc-SiC films by coating nanostructure Ag films and study the
influences of surface plasmon on photoluminescence properties by varying spacer thickness. PL curves of the samples
deposited with different thickness of α-SiNx present two PL peaks which are contributed to the interference in the films
and surface plasmon resonance, respectively. The PL intensity of the sample coated with Ag film is quenched due to
combination of Forster nonradiative process and coherent photonic mode reduction in nc-SiC films, while the PL
intensity of the samples with inserted spacer α-SiNx is enhanced because of the surface plasmon resonance.