Jing Yuan
at Southwest Univ. of Science and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 April 2020 Paper
Proceedings Volume 11455, 114551L (2020) https://doi.org/10.1117/12.2560997
KEYWORDS: Resonators, Aluminum nitride, Acoustics, Sensors, Crystals, Thin films, Finite element methods, Quartz, Silicon, Piezoelectric effects

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