Jing Zhang
at North China Univ. of Technology
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 November 2018
Proc. SPIE. 10819, Optical Metrology and Inspection for Industrial Applications V
KEYWORDS: Wafer-level optics, Light sources, Light emitting diodes, Cameras, Sensors, Image processing, Control systems, Image transmission, Feedback control, Semiconducting wafers

Proceedings Article | 3 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Lithography, Light sources, Lithographic illumination, Image resolution, 3D modeling, Image quality, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 3 October 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Roads, Manufacturing, Microelectronics, Photomasks, Extreme ultraviolet, Image classification, Extreme ultraviolet lithography, SRAF, Model-based design

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