Dr. Jingya Qi
at Xian Jiaotong Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 May 2018
Proc. SPIE. 10678, Optical Micro- and Nanometrology VII
KEYWORDS: Laser sources, Mirrors, Beam splitters, Interferometers, Optical testing, Heterodyning, Frequency modulation

Proceedings Article | 24 November 2016
Proc. SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV
KEYWORDS: Optical components, Laser sources, Beam splitters, Interferometers, Sensors, Calibration, Polarizers, Heterodyning, Optical proximity correction, Phase shifts

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