Dr. Jingya Qi
at Xian Jiaotong Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 May 2018 Presentation + Paper
Proc. SPIE. 10678, Optical Micro- and Nanometrology VII
KEYWORDS: Interferometers, Heterodyning, Mirrors, Beam splitters, Optical testing, Frequency modulation, Laser sources

Proceedings Article | 24 November 2016 Paper
Proc. SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV
KEYWORDS: Calibration, Interferometers, Phase shifts, Heterodyning, Optical proximity correction, Beam splitters, Sensors, Laser sources, Polarizers, Optical components

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