Dr. Jingyu Huang
at Wojskowa Akademia Techniczna im. Jaroslawa Dabrowskiego
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 April 1998
Proc. SPIE. 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
KEYWORDS: Electron beams, Chemical species, Sputter deposition, Microscopy, Particles, Interfaces, Magnetism, Chromium, Ion beams, Atmospheric particles

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