Accelerometers are one of the important sensors for a number of applications. In this paper, an accelerometer utilizing optical means for sensing the acceleration is introduced. The proposed accelerometer combines micro optical, electrical and mechanical means (MOEMS) to achieve high sensitivity, wide measurable range, as well as minimal losses in optical part. The optical subsystem is a highly integrated system where passive and active components are all monolithically integrated together. Photo-elastic effect and electro-optical modulation are used when sensing and processing the acceleration. The simulation models of the parts of optical subsystem and its parts and the results are also analyzed.
We first proposed monolithic optoelectronic integration of Resonant Tunneling Diode (RTD) and Heterojunction Bipolar Phototransistor (HPT). Circuit simulations using simple models of RTD and HPT successfully produced the optoelectronic bistable characteristics of RTD and HPT Negative Differential Resistance (NDR) device. The basic operation mechanism of Photoelectric Monostable-Bistable Transition Logic Elements (PMOBILE's) by utilizing the functionality of two series-connected RTDs in combination with HPT is also demonstrated by simulation.