Dr. Jinho Lee
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2020
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Critical dimension metrology, Semiconducting wafers, Stochastic processes, Edge roughness

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