Jinhong Kim
at Univ of Illinois
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 September 2019
Proc. SPIE. 11086, UV and Higher Energy Photonics: From Materials to Applications 2019
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Polymethylmethacrylate, Polymers, Lamps, Photoresist materials, Photomasks, Excimers, Photoresist developing

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