Dr. Jinlai Liu Profile

Dr. Jinlai Liu

at Beijing Superstring Academy of Memory Technology

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Publications (1)

Proceedings Article | 21 November 2023 Poster + Paper

Optimized test pattern selection with machine learning method

Peng Xu, Juan Wei, Jingkang Qin, Jinlai Liu, Guangyu Sun, Song Sun, Cuixiang Wang, Qingchen Cao, Jiangliu Shi

Proceedings Volume 12751, 1275113 (2023) https://doi.org/10.1117/12.2685435

KEYWORDS: Data modeling, Matrices, Optical proximity correction, Machine learning, Lithography, Advanced patterning, Active learning, Process modeling, Deconvolution

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