Dr. Jinni Tsay
Student at National Tsing Hua Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 4 January 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Microelectromechanical systems, Actuators, Bistability, Mirrors, Switching, Complex systems, Liquid crystal on silicon, Bismuth, Motion analysis, Instrument modeling

Proceedings Article | 24 April 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Actuators, Sensors, Reliability, Smart sensors, Microrelays

Proceedings Article | 19 November 2001
Proc. SPIE. 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II
KEYWORDS: Microelectromechanical systems, Actuators, Microscopes, Mirrors, Switching, Microsystems, Photography, Manufacturing, Adaptive optics, Scanning electron microscopy

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