Mr. Jinseo Choi
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Wafer-level optics, Defect detection, Etching, Electrons, Silicon, Inspection, Wafer inspection, Semiconducting wafers, Signal detection, Virtual colonoscopy

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Electronics, Sensors, Electron microscopes, Control systems, Image analysis, Scanning electron microscopy, Image quality, Critical dimension metrology, Semiconducting wafers, Electron transport

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