Jinseo Choi
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Wafer inspection, Wafer-level optics, Defect detection, Signal detection, Inspection, Electrons, Silicon, Virtual colonoscopy, Semiconducting wafers, Etching

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Image quality, Sensors, Critical dimension metrology, Electron microscopes, Electron transport, Image analysis, Control systems, Electronics

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