Jinyoung Yoon
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (6)

Proceedings Article | 1 April 2009 Paper
Proceedings Volume 7273, 727339 (2009) https://doi.org/10.1117/12.814483
KEYWORDS: Diffusion, Polymers, Electroluminescence, Optical lithography, Photoresist materials, Lithography, Electronics, Image compression, Temperature metrology, Resolution enhancement technologies

Proceedings Article | 4 December 2008 Paper
Proceedings Volume 7140, 714032 (2008) https://doi.org/10.1117/12.804671
KEYWORDS: Reflectivity, Lithography, Critical dimension metrology, Line width roughness, Immersion lithography, Optical lithography, Photomasks, Scanning electron microscopy, Electroluminescence, Control systems

Proceedings Article | 29 March 2006 Paper
Mitsuhiro Hata, Jin-Young Yoon, Jung-Hwan Hah, Man-Hyoung Ryoo, Sang-Jun Choi, Han-Ku Cho
Proceedings Volume 6153, 61531Y (2006) https://doi.org/10.1117/12.655955
KEYWORDS: Photoresist materials, Thin film coatings, Extreme ultraviolet lithography, Polymers, Coating, Photoresist developing, Semiconducting wafers, Extreme ultraviolet, Lithography, Scanning electron microscopy

Proceedings Article | 24 March 2006 Paper
Jangho Shin, Jinyoung Yoon, Youngjae Jung, SukJoo Lee, Sang-Gyun Woo, Han-Ku Cho, Joo-Tae Moon
Proceedings Volume 6152, 61520X (2006) https://doi.org/10.1117/12.655516
KEYWORDS: Line width roughness, Software development, Photoresist materials, Edge roughness, Transistors, Critical dimension metrology, Polarization, Statistical analysis, Spectrum analysis, Semiconductors

Proceedings Article | 14 May 2004 Paper
Won-Young Chung, Tai-Kyung Kim, Jin-Young Yoon, Hyun-Woo Kim, Young-Kwan Park, Jeong-Taek Kong
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534809
KEYWORDS: Optical lithography, Lithography, Interfaces, Temperature metrology, 3D modeling, Calibration, Scanning electron microscopy, Resolution enhancement technologies, Thermal modeling, Electron microscopes

Showing 5 of 6 publications
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