Jinyu Li
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 October 2016 Paper
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Antireflective coatings, Glasses, Interfaces, Reflectivity, Near field, Photomasks, Stray light

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