Prof. Jinyu Zhang
at Tsinghua Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 9 September 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Lithography, Atrial fibrillation, Rutherfordium, Matrices, Wavelets, Photomasks, Source mask optimization, Convolution, Electromagnetic coupling, Actinium

Proceedings Article | 23 September 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Lithography, Atrial fibrillation, Photomasks, Double patterning technology, Optical proximity correction, SRAF, Optimization (mathematics), Semiconducting wafers, Binary data, Algorithms

Proceedings Article | 11 May 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Lithography, Surface plasmons, Visualization, Matrices, Computer programming, Inverse problems, Photomasks, Convolution, Optimization (mathematics), Resolution enhancement technologies

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