Dr. Jisoong Park
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (19)

Proceedings Article | 23 October 2015 Paper
Sukho Lee, So-Eun Shin, Jungwook Shon, Jisoong Park, Inkyun Shin, Chan-Uk Jeon
Proceedings Volume 9635, 96350V (2015) https://doi.org/10.1117/12.2197162
KEYWORDS: Data modeling, Calibration, Critical dimension metrology, Reverse modeling, Process modeling, Scanning electron microscopy, Model-based design, Distortion, Reliability, Statistical modeling

Proceedings Article | 23 October 2015 Paper
Nobuyasu Takahashi, So Goto, Dai Tsunoda, So-Eun Shin, Sukho Lee, Jungwook Shon, Jisoong Park
Proceedings Volume 9635, 96351G (2015) https://doi.org/10.1117/12.2196713
KEYWORDS: Photomasks, Process modeling, Calibration, Error analysis, Computer simulations, Etching, Statistical modeling, Scanning electron microscopy, Photoresist processing, Cadmium

Proceedings Article | 8 October 2014 Paper
Takuya Tao, Nobuyasu Takahashi, Masakazu Hamaji, Jisoong Park, Sukho Lee, Sunghoon Park
Proceedings Volume 9235, 923521 (2014) https://doi.org/10.1117/12.2069240
KEYWORDS: Photomasks, Vestigial sideband modulation, Ions, Lithography, Resolution enhancement technologies, Optical proximity correction, Modulation, Data processing, Model-based design, Control systems

SPIE Journal Paper | 2 December 2013
JM3, Vol. 13, Issue 01, 011003, (December 2013) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.011003
KEYWORDS: Photomasks, Electron beam lithography, Computational lithography, Lithography, Manufacturing, Data modeling, Optical proximity correction, Vestigial sideband modulation, Semiconducting wafers, Model-based design

Proceedings Article | 12 April 2013 Paper
Jin Choi, In-Yong Kang, Ji Soong Park, In Kyun Shin, Chan-Uk Jeon
Proceedings Volume 8683, 86830L (2013) https://doi.org/10.1117/12.2011341
KEYWORDS: Photomasks, Data modeling, Manufacturing, Lithography, Computational lithography, Optical proximity correction, Optical lithography, Semiconducting wafers, Electron beam lithography, Computer aided design

Showing 5 of 19 publications
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